By Condon E. U.
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181 17. N. Maeda, T. Makimura, T. X. Wang, M. Hiroki, H. Yokoyama, T. Makimoto, T. Kobayashi, and T. Enoki: Jpn J. Appl. Phys. Part 2: Lett. Express Lett. 44 (2005) L646 18. S. L. Wang, and M. Ichikawa: Jpn J. Appl. Phys. Part 2: Lett. 41 (2002) L820 19. M. Hikita, M. Yanagihara, K. Nakazawa, H. Ueno, Y. Hirose, T. Ueda, Y. Uemoto, T. Tanaka, D. Ueda, and T. Egawa: Electron Devices Meeting, 2004 – IEDM Technical Digest, IEEE International, San Francisco, California, 2004, p. 803 20. T. Makimoto, Y.
Kumakura, Y. Yamauchi, and T. Makimoto: Phys. 1 IV–IV Group Semiconductors SiC (S. Yoshida) Crystal Structure Silicon carbide is a binary AN B8−N compound with eight valence electrons per atom and as shown in Fig. 1a, the four nearest neighbor atoms form a regular tetrahedral crystal structure. Since Si and C are both group IV atoms, they are covalently bonded. However, according to Pauling , the diﬀerences in the electronegativity of Si and C results in the compound having ionicity of 12%. 12 eV).
1. 9 400 603 easy easy yes yes 1 Development and Applications of Wide Bandgap Semiconductors 13 Fig. 6. Comparison of performance of Si and SiC devices in the case of Schottky diodes 1014 –1019 cm−3 both for p- and n-types by impurity doping. Further, the surface of SiC can be covered with high-quality oxide layers by thermal oxidation, an essential factor for device fabrication. 6 shows a comparison of the characteristics of Si and SiC Schottky diodes, majority-carrier power devices. The upper ﬁgure is a comparison of the device length, which shows that the one order of magnitude larger breakdown ﬁeld strength of SiC enables a reduction of its device length to 1/10 of that required for Si.